1991金沙棋牌规格书
SPECIFICATIONS
深紫外核心材料 · Sapphire/AlN外延片/模板
WAlN-SA400
2~3 μm,(002) ≤ 80 arcsec,(102) ≤ 400 arcsec
金沙棋牌1991cc
Hubei DUVTek Co., LTD.
湖北省鄂州市梧桐湖新区凤凰大道9号东湖高新科技创意城B08栋
Building B08, Donghu High-tech Innovation City, No. 9 Fenghuang Avenue, Wutong Lake New District, Ezhou, Hubei, China
性能 Properties | 参数值 Value |
---|---|
直径 Diameter | 2 inch (50.8±0.05 μm) |
衬底类型 Substrate | Sapphire |
衬底厚度 Substrate Thickness | 430±20 μm |
外延层厚度 Epilayer Thickness | 2~3 μm |
(002) 晶体质量 Crystal quality (FWHM of 002 XRC) | ≤ 80 arcsec |
(102) 晶体质量 Crystal quality (FWHM of 102 XRC) | ≤ 400 arcsec |
正面粗糙度 Front side roughness | ≤ 1 nm |
边缘扣除 Edge exclusion | ≤ 3 mm |
贯穿裂纹 Through Crack | none |
a面(11-20)取向 Surface orientation of a-plane | 0°±0.1° |
m面(11-20)取向 Surface orientation of m-plane | 0.2°±0.1° |
定位边晶向 Primary flat orientation | a-plane±0.1° |
定位边长度 Primary flat length | 16±1 mm |
反面粗糙度 Back side roughness | 0.8±0.2 μm |